The beam (ø3 mm) from the heterodyne laser source (Zygo® 7702) is delivered to the interferometers with three periscopes and two fold-mirrors. The triangular path is in the horizontal plane and below the interferometers. Polarization optics, integrated into the periscopes, minimize the polarization mixing.
figure 1: beam delivery components

back to overview interferometers mirrors beam delivery sampleholder straight guides actuation