Three identical, custom made, heterodyne interferometers measure the translations of the sample table assembly relative to the stationary reference mirror. The beam layout of these double-pass differential plane mirror interferometers (DPMI's) is given in figure 1.
A polarizing beamsplitter divides the incoming two-frequency laser beam into a reference beam and a measurement beam. Each beam is then reflected twice by its respective mirror before being recombined and coupled into a fiber-optic detector. Beamsplitters and wave plates separate the first and second pass.
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The overall dimensions of the DPMI optics are 58 x 48 x 10 mm (figure 2).
When used with Zygo® ZMI4004 measurement electronics the resolution is 0.15 nm.
The interferometer is available as a separate product. Please use the contact details on the right of this page if you want to learn more about the possibilities.
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CONTACT
Telephone: | +31 40 247 4580 |
Mobile: | +31 650 483 500 |
Fax: | +31 848 395 498 |
Email: | info(at)nanostage3d.com |