Three mutually orthogonal interferometers measure the relative movements of the sample. The moving target for the interferometers is a monolithic mirror which mirror-normals coincide with the measurement probe position on the 3D stage (figure 1). The reference mirror has a similar shape (figure 2). Aligning the mirror surfaces of the reference mirror and measurement mirror minimizes the deadpath error.
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Both mirrors are made from zerodur®, their thermal centers of expansion coincide with the probe position for optimal thermal stability.
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