degrees of freedom three mutually orthogonal translations
stroke 1 x 1 x 1 mm
resolution <1 nm
accuracy nm – range
overall dimensions ø250 x 190 mm

Instrument characteristics

straight guide parallel elastic
actuation lorentz-type with
weight and stiffness compensation
measurement system - custom differential plane mirror interferometers
- monolithic zerodur® mirrors
- beam delivery optics integrated in instrument
other - kinematic sampleholder
- internal transportation lock
- transport case and dust cover


amplifier 18 bit linear current type (TUE-GTD)
controller PC104 with remote workstation
measurement Zygo® ZMI4004 board with fiber-optic pickups,
Zygo® 7702 HeNe-laser with ø3mm beam