General |
|
degrees of freedom | three mutually orthogonal translations |
stroke | 1 x 1 x 1 mm |
resolution | <1 nm |
accuracy | nm – range |
overall dimensions | ø250 x 190 mm |
Instrument characteristics |
|
straight guide | parallel elastic |
actuation | lorentz-type with |
weight and stiffness compensation | |
measurement system | - custom differential plane mirror interferometers |
- monolithic zerodur® mirrors | |
- beam delivery optics integrated in instrument | |
other | - kinematic sampleholder |
- internal transportation lock | |
- transport case and dust cover | |
Electronics |
|
amplifier | 18 bit linear current type (TUE-GTD) |
controller | PC104 with remote workstation (IME-technologies) |
measurement | Zygo®
ZMI4004 board with fiber-optic pickups, Zygo® 7702 HeNe-laser with ø3mm beam |
CONTACT
Telephone: | +31 40 247 4580 |
Mobile: | +31 650 483 500 |
Fax: | +31 848 395 498 |
Email: | info(at)nanostage3d.com |